Metal | Product | Formula | Purity |
|---|---|---|---|
| Al | TEAl (triethylaluminum) | Al(C2H5)3 | ≥ 99.9995 |
| Al | TMAl (trimethylaluminum) | Al(CH3)3 | ≥ 99.9999 |
| Ga | TEGa (triethylgallium) | Ga(C2H5)3 | ≥ 99.9999 |
| Ga | TMGa (trimethylgallium) | Ga(CH3)3 | ≥ 99.9999 |
| In | TEIn (triethylindium) | In(C2H5)3 | ≥ 99.9999 |
| In | TMIn (trimethylindium) | In(CH3)3 | ≥ 99.9999 |
| Mg | Cp2Mg (bis(cyclopentadienyl)magnesium) | Mg(C5H5)2 | ≥ 99.9998 |
| Sb | TESb (triethylantimony) | Sb(C2H5)3 | ≥ 99.9995 |
| Sb | TMSb (trimethylantimony) | Sb(CH3)3 | ≥ 99.9995 |
| Te | DETe (diethyltellurim) | Te(C2H5)2 | ≥ 99.9998 |
| Te | DTBTe (ditertbutyltellurim) | Te(C4H9)2 | ≥ 99.99 |
| Zn | DEZn (dimethylzinc) | Zn(C2H5)2 | ≥ 99.9999 |
| Zn | DMZn (dimethylzinc) | Zn(CH3)2 | ≥ 99.9999 |
Bubblers
Our metalorganic products are supplied in the highest quality bubblers. Materials, construction and surface finishes conform to rigorous standards of the semiconductor industry.
Sizes range from 200 ml to 20 liters.
Inlet & outlet dimensions are standardized to MOCVD tool requirements.
Unique solid source bubblers provide excellent flux stability and high utilization.
Bubbler dimensional data are available on request.