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    Localization of Key Materials of "China Core"

    Precursor Materials
    Electronic Special Gases
    Photoresists and Supporting Materials
    Sulfur hexafluoride (SF₆)
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    Sulfur hexafluoride (SF₆)
    • Chinese Name：六氟化硫
    • English Name：Sulfur hexafluoride
    • CAS Number：2551-62-4
    • Melting Point：-50.8℃
    • Boiling Point：-63.8℃
    • Vapour Pressure：21.5atm
    • Product Purity：Semi grade: 5N Adduct grade: 4.5N, 5N
    • Package Size：Semi grade: 47L(50kg), 440L(500kg), 880L(1100kg) Adduct grade: 6L(8kg), 8L(10kg), 10L(12kg), 12L(15kg), 15L, 40L(50kg), 47L(50kg)
    Nitrogen trifluoride (NF₃)
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    Nitrogen trifluoride (NF₃)
    • Chinese Name：三氟化氮
    • English Name：Nitrogen trifluoride
    • CAS Number：7783-54-2
    • Melting Point：-208.5℃
    • Boiling Point：-129℃
    • Vapour Pressure：>1atm
    • Product Purity：4.6N
    • Package Size ：47L(20kg)、440L(200kg)、bundle(320kg)、8800L(4000kg)、13200(6000kg)、18800L(8000kg)
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